Micro and Nano Processing | MEMS Fine Processing (III)
微纳加工 | MEMS精细加工(三) 面向MEMS的微细加工技术是在集成电路的基础上形成的,先后有了超精密机械 […]
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微纳加工 | MEMS精细加工(三) 面向MEMS的微细加工技术是在集成电路的基础上形成的,先后有了超精密机械 […]
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Micro-Nano Processing | MEMS Fine Processing(II) Microfabrication technology is the basis for the realization of microelectromechanical systems (MEMS), and is also the core technology and research hotspot of MEMS.
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Micro-Nano Processing | MEMS Processing Introduction (I) Microsystems (Microsystems, the usual European term), Micro Electro Mechanical Systems (Micro E)
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Micro & Nano Processing | Introduction to Wet Cleaning Processes IC processes require the involvement of a number of organic reagents and inorganic reagents to complete, in addition, the fabrication process is always in the human involvement in the
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Micro & Nano Processing | Introduction to Electroplating Electroplating utilizes the principle of electrolysis to deposit metals or alloys on the surface of a substrate to form a uniform, dense, and well-bonded metal layer.
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Micro-Nano Processing | Introduction to dry etching process Etching technology is divided into: wet etching and dry etching Wet etching is divided into: chemical etching and electrolytic etching Dry etching is divided into
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Micro-Nano Processing | Introduction to Thin Film Deposition Processes Table of Contents What is Thin Film Deposition (Coating)? Thin film deposition (coating) is the process of forming and depositing a thin film coating on a substrate material.
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Micronanofabrication | Thin Film Deposition, Lithography, and Etching Overview Nanofabrication is divided into three distinct areas: thin films, lithography, and etching. Thin films, using physical vapor such as vapor deposition
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Micronanofabrication | Lithography - Nanoimprint Lithography Nanoimprint Lithograph
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Micro-Nano Processing | Lithography - Fib Focused Ion Beam Lithography This is a mask-less, resist-less scanning lithography technique. It is very similar to EBL
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