Microprocessing | Microfluidic Chips Microfluidic chips have become a powerful tool for studying biological systems at single-cell resolution. At the same time, microfluidic chips can not only be widely [...]
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Micro-nano structure/MEMS foundry platform technology capability The laboratory platform has a total of more than 200 pieces of equipment, including the main equipment (more than 40 pieces) including: - Graphics
MEMS Foundry Capabilities | Photolithography Plating Etching Coating Read More »
UV-LIGA Electroforming | Manufacture of Metal Array Stencils Currently the main process technologies for the preparation of fine metal stencils are: photolithography-etching, laser processing and photolithography.
LIGA/UV-LIGA Plating | Metal Microstructures RF Devices Inertial Sensors Heat Dissipation Microstructural Applications Microsystems, Inc.
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Micronanofabrication | For Cell Arraying Cell microarraying (or cell patterning) 'is also known as constraining the cells under study to a defined spatial location' it
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Micro-Nano Processing | Preparation of Micro-Nano Optical Elements Micro-Nano Optical Elements are free-form optical surfaces and micro-junctions with sub-micron surface accuracy and nanometer surface roughness.
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Micro-Nano Processing | MEMS Fine Processing (VII) 1.10 Bonding Technology Wafer bonding is similar to soldering in that no adhesive is used and the material layers are melted together to form a bond.
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Micro-Nano Processing | MEMS Fine Processing 1.6 Sacrificial Layer Technology Sacrificial layer technology is also known as separation layer technology. Sacrificial layer technology involves the use of a chemical vapor (CV) on a silicon substrate.
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Micro-Nano Processing | MEMS Fine Processing (V) 1.5 high-energy beam etching technology (1) electron beam etching using the chemical effect of the electron beam etching
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Micro-Nano Processing | MEMS Fine Processing(4) 1.3 Photolithography Photolithography, also known as photolithography, originated in the manufacture of integrated circuits for microelectronics. Photolithography
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