RF MEMS micro and nano fabrication
Micro and Nano Processing
Nowadays, with the development of mobile terminals, RF devices made by MEMS technology are easier to integrate and more flexible, which are suitable for the modern RF microwave field's requirements of low loss, small size and low cost devices. For this reason, we have launched our micro and nano processing prototype verification service to help our customers achieve the fastest product verification.
Drawing optimization and process determination
In order to best achieve this, we will first evaluate your drawings, provide suggestions for drawing modifications, and recommend the appropriate process and equipment for processing. In addition, our company promises to destroy the records of your drawing files in the local computer after the delivery is completed to achieve absolute protection of customer privacy.
Structural testing characterization report
In order to guarantee the quality of the delivery, we provide a quality report on the finished product (usually an optical inspection report). But at the same time, we additionally provide measurements of surface geometric parameters and mechanical characteristics of the finished product. This covers tests on the three-dimensional dimensions of the components, contours, film thickness, surface roughness, tensile, transmission characteristics, durability, etc.
Micro and nano structures
Structural units
Inductors
Structural units
Phase shifter
Structural units
Matching Network
Structural units
Variable Capacitance
Structural units
Resonator
Structural units
Antenna
Structural units
Switch
Structural units
Filters
Our Capabilities
Processes
Lithography (Photolithography)
Electron beam lithography (EBL)UV lithographyProximity/contact lithography, stepper lithography, etc.
Processes
Two-Photon Polymerization 3D Printing (TPP)
Processes
Etching (Etching)
Focused ion beam etching, deep reactive ion etching, inductively coupled plasma etching, ion beam sputtering etching, etc.
Processes
Nanoimprinting(NIL)
Nano-thermal embossing, UV-curable embossing, micro-contact printing (soft etching)
Processes
Coating
Magnetron sputteringAtomic layer deposition.Ion beam sputtering, ,Plasma chemical vapor deposition, etc.
Processes
Electroforming (LIGA)
Test characterization
Detection means
Optical microscopy (Microscopy)
Detection means
Profilometer (Profilometer)
Detection means
Sheet Resistance Measurement
Detection means
Hall measurement )
Applications
Micro and Nano Applications
Satellite Communications
Micro and Nano Applications
Internet of Things
Micro and Nano Applications
Navigation terminals
Micro and Nano Applications