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Micro and Nano Processing | Grayscale Lithography of 3D Optical Structures Grayscale processing technology enables a variety of micro-optical components to be used in a variety of applications, using contour lithography to shape
Micro and Nano Processing | Introduction to Diffractive Optical Element (DiffractiveOpticalElement, D
Substrates/Substrates Commonly Used in Optoelectronic Devices Silicon Silicon is used as a standard material in integrated circuits and is the most widely studied material in the world.
Micro and Nano Processing | MEMS Research Direction Classification MEMS research has formed a more complete system covering a number of research areas, mainly including basic
Micro-Nano Processing | MEMS Micro-Energy Device System Preparation With the improvement of micro-machining technology level and micro-electronics technology level, MEMS system
Micro and Nano Processing | E-paper micro-cups micro-chamber type structure preparation For the current economic model facing energy crisis and vigorously developing energy-saving and emission reduction technology
Micro and Nano Processing | AIE Polymer Light Emitting Device Fabrication Micro and Nano Light Emitting Devices play an important role in the development of integrated optics, such as: light enhancement
Micro-Nano Processing| Protein-based Micro-Nano Device Chip Fabrication In recent years, due to the development of portable devices. People pay more attention to the flexibility of electronic devices. Especially
Micro and Nano Processing | Microfluidic Chips Microfluidic chips have become a powerful tool for studying biological systems at single cell resolution. At the same time, microfluidic chips
Micro and nano structure / MEMS foundry platform technology capabilities The laboratory platform has a total of more than 200 sets of equipment, including the main equipment (more than 40 sets) include
UV-LIGA Electroforming | Fabrication of Metal Array Stencils The main process technologies for preparing fine metal stencils are: photolithography-etching method, laser processing
LIGA/UV-LIGA Plating | Metal Microstructures RF Devices Inertial Sensors Heat Dissipation Microstructure Applications Microsy
