Solutions - Micro and Nano Processing

LIGA/UV-LIGA Plating | Metal Microstructures RF Devices Inertial Sensors Heat Dissipation Microstructural Applications Microsystems, [...

Micronanofabrication | For Cell Arraying Cell microarraying (or cell patterning) 'is also known as constraining the cells under study to a defined spatial location' it

Micro-Nano Processing | Preparation of Micro-Nano Optical Elements Micro-Nano Optical Elements are free-form optical surfaces and micro-junctions with sub-micron surface accuracy and nanometer surface roughness.

Micro-Nano Processing | MEMS Fine Processing (VII) 1.10 Bonding Technology Wafer bonding is similar to soldering in that no adhesive is used and the material layers are melted together to form a bond.

Micro-Nano Processing | MEMS Fine Processing 1.6 Sacrificial Layer Technology Sacrificial layer technology is also known as separation layer technology. Sacrificial layer technology involves the use of a chemical vapor (CV) on a silicon substrate.

Micro-Nano Processing | MEMS Fine Processing (V) 1.5 high-energy beam etching technology (1) electron beam etching using the chemical effect of the electron beam etching

Micro-Nano Processing | MEMS Fine Processing(4) 1.3 Photolithography Photolithography, also known as photolithography, originated in the manufacture of integrated circuits for microelectronics. Photolithography

Micro-Nano Processing | MEMS Fine Processing (3) MEMS-oriented microfabrication technology is formed on the basis of integrated circuits, there have been ultra-precision machinery

Micro-Nano Processing | MEMS Fine Processing(II) Microfabrication technology is the basis for the realization of microelectromechanical systems (MEMS), and is also the core technology and research hotspot of MEMS.

Micro-Nano Processing | MEMS Processing Introduction (I) Microsystems (Microsystems, the usual European term), Micro Electro Mechanical Systems (Micro E)