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Micro-Nano Processing | MEMS Fine Processing(4) 1.3 Photolithography Photolithography, also known as photolithography, originated in the manufacture of integrated circuits for microelectronics. Photolithography [...]

Micro-Nano Processing | MEMS Fine Processing (3) MEMS-oriented microfabrication technology is formed on the basis of integrated circuits, there have been ultra-precision machinery

Micro-Nano Processing | MEMS Fine Processing(II) Microfabrication technology is the basis for the realization of microelectromechanical systems (MEMS), and is also the core technology and research hotspot of MEMS.

Micro-Nano Processing | MEMS Processing Introduction (I) Microsystems (Microsystems, the usual European term), Micro Electro Mechanical Systems (Micro E)

Micro & Nano Processing | Introduction to Wet Cleaning Processes IC processes require the involvement of a number of organic reagents and inorganic reagents to complete, in addition, the fabrication process is always in the human involvement in the

Micro & Nano Processing | Introduction to Electroplating Electroplating utilizes the principle of electrolysis to deposit metals or alloys on the surface of a substrate to form a uniform, dense, and well-bonded metal layer.

Micro-Nano Processing | Introduction to dry etching process Etching technology is divided into: wet etching and dry etching Wet etching is divided into: chemical etching and electrolytic etching Dry etching is divided into

Micro-Nano Processing | Introduction to Thin Film Deposition Processes Table of Contents What is Thin Film Deposition (Coating)? Thin film deposition (coating) is the process of forming and depositing a thin film coating on a substrate material.

Micronanofabrication | Thin Film Deposition, Lithography, and Etching Overview Nanofabrication is divided into three distinct areas: thin films, lithography, and etching. Thin films, using physical vapor such as vapor deposition

Micronanofabrication | Lithography - Nanoimprint Lithography Nanoimprint Lithograph